AR Waveguides | Foundry Services | SCIVAX
Foundry Application

AR Waveguides

High-precision molding of SRG-type waveguides for AR/MR glasses. We support both diffraction grating formation in high-refractive-index resin and etching of high-refractive-index inorganic materials such as SiC. With low-distortion imprinting using Dyad®, we mass-produce high-yield, high-quality waveguides.

AR Waveguides
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Why Choose SCIVAX
01

Support for Two Molding Process Types

We support both direct molding with high-refractive-index imprint resin and processes that etch high-refractive-index substrates such as SiC. We build materials and processes from the ground up.

02

Low-Distortion Imprinting with the Fully Automatic UV Nanoimprint System Dyad®

The Hard-to-Hard method using our proprietary Dyad® minimizes pattern pitch misalignment between the In-Coupler and Out-Coupler, enabling high-precision molding while suppressing image quality degradation.

03

High-Yield Mass Production

Low-distortion imprinting greatly improves waveguide yield without being affected by pupil size or FOV. Yield improvement in mass production directly contributes to cost reduction.

04

Molding Experience with High-Refractive-Index Materials

We support molding of high-refractive-index imprint resin onto transparent glass substrates with n=2.0 or higher, stably forming diffraction gratings in a variety of shapes.

05

Wafer Support up to phi 8″

Foundry services are currently available up to phi 8″. Dyad® systems are also sold in 8″ and 12″ formats, preparing for future large-diameter requirements.

06

Integrated Support

In addition to foundry services, we also sell Dyad® systems. For customers considering in-house production, we provide integrated support for both equipment and processes.

Dyad®

Improved Image Quality through Low-Distortion Imprinting

Compared with conventional NIL methods, Dyad®’s Hard-to-Hard method reduces pattern pitch misalignment between the In-Coupler and Out-Coupler. It suppresses the impact of pupil size and FOV variation on yield, enabling high-precision AR waveguides to be produced at high yield.

Two Supported Molding Types

Type A: Direct Molding into High-Refractive-Index Resin

High-n resin imprint on high-n substrate

High-Refractive-Index Resin Molding

SRG-type diffraction gratings are formed on a high-refractive-index transparent substrate (glass n=2.0 or higher) using high-refractive-index imprint resin.

  • Substrate: high-refractive-index glass (n≥2.0)
  • Molding material: high-refractive-index imprint resin
  • Supports diffraction gratings in a variety of shapes

Type B: High-Refractive-Index Substrate Etching

Substrate etching (e.g. SiC)

SiC Etching

Diffraction gratings are formed by etching high-refractive-index substrates themselves, such as SiC and TiO2. Using imprint resin dedicated to etching, direct patterning onto inorganic films such as substrates is achieved.

  • Substrate: high-refractive-index materials such as SiC and TiO2
  • Uses imprint resin dedicated to etching
  • High-precision patterning onto inorganic films such as substrates
Specifications
ItemSpecifications / Supported Range
Supported TypesHigh-refractive-index resin molding (Type A) / high-refractive-index substrate etching (Type B)
Substrate Refractive IndexSupports high-refractive-index transparent substrates with n = 2.0 or higher
Imprint MethodHard-to-Hard low-distortion imprinting with Dyad®
Supported Wafer SizesUp to phi 8″ (foundry) / phi 8″ and phi 12″ (Dyad® system sales)
Pattern TypesSRG-type diffraction gratings (In-Coupler / Out-Coupler)
FeaturesMinimized pattern pitch misalignment and high yield through low distortion
Yield Improvement Comparison and Molding Examples
Low-Distortion Imprinting with Dyad

Dyad® Low-Distortion Imprinting

A yield improvement example for Dyad® molding compared with a conventional NIL method. The impact of pupil size and FOV variation on waveguide yield is minimized.

Nanoimprinted patterns

Nanoimprint Diffraction Grating Pattern

SEM cross-sectional image of a diffraction grating pattern molded for AR waveguides. High-precision reproducibility of the grating shape was confirmed.


Considering Development or Mass Production of AR Waveguides?

We will propose a solution tailored to your specifications and production scale. Please feel free to contact us.

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